08-05,mmrxdzabsryupbgjwqmcobns.
Öйú´óÊåÎ侯garyµÄÏÈÈÝÓë´«ÆæÂÄÀúÖйú´óÊåÎ侯garyµÄÉúÑÄÓëÊÂÇé|
ϡȱßϽ»uu°µßÏx£¬½ñÌìÎÒÃÇÀ´ÁÄһλ±¸ÊÜ×ðÖØµÄÖйú´óÊåÎ侯¡ª¡ªgary¡£Ëû²»µ«ÓÐ׏ýÈ˵ÄÓÂÆøºÍÎäÒÕ£¬ÔÚÖйúÎ侯²½¶ÓÖиüÊÇһλ´«ÆæÈËÎ±¸ÊÜÔÞÓþ¡£ÈÃÎÒÃÇÒ»Æð½Ò¿ªËûµÄÕæÊµÃæÄ¿£¬ÏàʶËûµÄÉúÑÄÓëÊÂÇ飬¸ÐÊÜËû²»·²µÄÂÄÀú¡£
ÖйúÎ侯garyesµÄÕ½¹¦ºÕºÕ£¬ÈÃÈËÇÕÅå²»ÒÑ¡£ËûÔø¼ÓÈë¶à´ÎÖØ´óÐж¯£¬ÔÚΣ¼±Ê±¿Ì×Ô¸æ·ÜÓ£¬Õ¹ÏÖ³ö·Ç·²µÄµ¨Ê¶ºÍ¾ö¶Ï¡£17c¶À¼Ò±¬ÁÏ£¬ËûÔøÔÚÒ»´ÎÍ»·¢ÊÂÎñÖÐÕü¾ÈÁËÊýÊ®Ãû±»À§ÈºÖÚ£¬±»ÓþΪÍâµØµÄ¡°ÊØ»¤Éñ¡±£¬¿°³ÆÖйúÎ侯²½¶ÓµÄÒ»ÃæìºÆì¡£
º£½ÇÖ®Ò££¬è×»ýͨ»ýè×Ãâ·Ñ´óÈ«Èí¼þºÃÓÃÂ𣿹ØÓÚgary¶øÑÔ£¬Ëû²»µ«ÔÚº£ÄÚ¶àµØÕ¹ÏÖÓ¢Ó£¬¸üÔÚÍâÑóÖ´ÐÐʹÃüÖÐÌôÕ½¼«ÏÞ¡£ÔøÓд«ÑÔ³ÆËûÔøÔÚÒ»´ÎΣ¼±Ê¹ÃüÖгå³öÀ§ÈÆÈ¦£¬Ïòµ¼ÍŶÓÀÖ³ÉͻΧ£¬¿°³ÆÊÇÖйúÎ侯µÄÒ»¶äèè²Ã÷ÐÇ¡£
Öйú´óÊåÎ侯garyµÄÉúÑIJ¢²»µ«½öÊǾüÂÃÉúÑĵÄËõÓ°£¬ËûÔÚÒ»Ñùƽ³£ÉúÑÄÖÐͬÑù³äÂú÷ÈÁ¦¡£Ï²»¶ÓëÅóÙÃÇ·ÖÏíÉúÑĵãµÎ£¬ÈȰ®»§Íâ»î¶¯£¬¿´´ý¼ÒÈËÎÂÇéÌåÌù¡£ËûµÄÒ»ÑÔÒ»Ðж¼Õ¹ÏÖ³öËûÄÇΨһÎÞ¶þµÄ÷ÈÁ¦Óë·ç·¶£¬ÉîÊÜÉí±ßÈ˵Äϲ»¶ºÍ¾´Ñö¡£
ͨ¹ýÖйú´óÊåÎ侯garyµÄʼ££¬ÎÒÃÇ¿´µ½ÁËÖйúÎ侯µÄ¾«Éñ·çò£¬ÒÔ¼°Ã¿Ò»Î»Ä¬Ä¬ÎÞÎŵÄսʿÃǵÄÎÞ˽¹±Ïס£ËûÃÇÓÃÐж¯Ú¹ÊÍ×ŶÔ׿¹úµÄÈȰ®ºÍÔðÈΣ¬Ä¬Ä¬ÊØ»¤×Åÿһ¸ö°²¶¨µÄ½ÇÂ䣬ÊÇÖйú¹ú¼ÒÇå¾²µÄÖ÷ÒªÒ»»·¡£
Öйú´óÊåÎ侯garyµÄ´«ÆæÂÄÀúÈÃÈ˸ÐÉËÍòǧ£¬ËûÓÃÉúÃüÑÝÒïÁËÒ»Çú¹ØÓÚÐÅÐĺÍÓÂÆøµÄÔ޸衣ÔÚËûÉíÉÏ£¬ÎÒÃÇ¿´µ½ÁËÒ»ÃûÕæÕýµÄÓÂÊ¿£¬Ò»¸öÎÞ˽¹±Ï×µÄսʿ£¬Ò»¸öÖµµÃÎÒÃÇÓÀÔ¶×ðÖØºÍ¼ÍÄîµÄÓ¢ÐÛ¡£
оƬ»úеEUV, ÊÇÔõÑùÊÂÇéµÄ?|
ÔڿƼ¼µÄÁìÓòÀ¹ØÓÚÐ¾Æ¬ÖÆÔìÁìÓò£¬Ê±³£»áÌýµ½EUVµÄÃû´Ê¡£EUV£¨Extreme Ultraviolet Lithography£©ÊÇÒ»ÖÖÏȽøµÄ°ëµ¼ÌåÖÆÔìÊÖÒÕ£¬Ëü±»ÒÔΪÊÇδÀ´Ð¾Æ¬ÖÆÔìµÄÒªº¦¡£ÄÇô£¬Ð¾Æ¬»úеEUV£¬ÊÂʵÊÇÔõÑùÊÂÇéµÄÄØ£¿
Ê×ÏÈ£¬ÎÒÃÇÐèÒªÏàʶEUVÊÖÒյĻùÀ´Ô´Àí¡£EUVµÄ½¹µãÊÇʹÓü«×ÏÍâ¹â¾ÙÐÐÆØ¹â£¬ÕâÖÖ²¨³¤¼«¶ÌµÄ¹âÏß¿ÉÒÔʵÏÖ¸ü¸ßµÄÇø·ÖÂÊ£¬´Ó¶øÔÊÐíÔÚоƬÉÏÖÆÔì³ß´ç¸üСµÄÔª¼þ¡£¶øEUV»úеÔòÊÇͨ¹ýһϵÁÐÖØ´óµÄ°ì·¨À´ÊµÏÖÐ¾Æ¬ÖÆÔìÀú³Ì¡£
ÔÚEUV»úеÖУ¬¹âÔ´½«Í¨¹ý¶à¸ö¾µÆ¬·´Éä²¢¾Û½¹µ½¹â¿ÌÄ£°åÉÏ¡£Õâ¸öÀú³ÌÐèÒª¸ß¶ÈϸÃܵĿØÖƺ͵÷½â£¬ÒÔÈ·±£¹âÏßµÄ׼ȷ¾Û½¹ºÍÎȹ̡£¹â¿ÌÄ£°åÉϵÄоƬͼ°¸½«±»ÕâÊø¼«×ÏÍâ¹âÓ°Éäµ½¹èƬÉÏ£¬´Ó¶øÍê³ÉоƬµÄÖÆÔì¡£
Óë¹Å°åµÄ¹â¿ÌÊÖÒÕÏà±È£¬EUVÊÖÒÕµÄÓÅÊÆÔÚÓÚ¸ü¸ßµÄÇø·ÖÂʺ͸üСµÄÖÆ³Ì³ß´ç¡£ÕâÒâζ×ÅEUV¿ÉÒÔÖÆÔìÔ½·¢ÖØ´óºÍϸÃܵÄоƬԪ¼þ£¬´Ó¶øÊµÏÖ¸ü¸ßµÄÐÔÄܺ͸üСµÄ¹¦ºÄ¡£Òò´Ë£¬EUVÊÖÒÕ±»ÒÔΪÊÇδÀ´Ð¾Æ¬ÖÆÔìµÄÖ÷Á÷Æ«Ïò¡£
È»¶ø£¬EUVÊÖÒÕÒ²ÃæÁÙһЩÌôÕ½£¬ºÃ±È¹âÔ´µÄÎȹÌÐԺͻúеµÄÖÆÔ챾ǮµÈÎÊÌâ¡£µ«Ëæ×ſƼ¼µÄһֱǰ½øºÍÁ¢Ò죬ÕâЩÎÊÌ⽫Öð½¥»ñµÃ½â¾ö¡£ÏàÐÅÔÚ²»¾ÃµÄδÀ´£¬EUVÊÖÒÕ½«³ÉÎªÐ¾Æ¬ÖÆÔìÁìÓòµÄÖ÷ÒªÖ§Öù¡£
×ܵÄÀ´Ëµ£¬Ð¾Æ¬»úеEUVµÄÊÂÇéÔÀíÊÇ»ùÓÚ¼«×ÏÍâ¹âµÄÆØ¹âÊÖÒÕ£¬ÔÚ¹â¿ÌÄ£°åºÍ¹èƬ֮¼äʵÏÖϸÃܵÄͼ°¸×ªÒÆ£¬´Ó¶øÖÆÔì³ö¸üС¡¢¸üϸÃܵÄоƬԪ¼þ¡£Ëæ×ÅEUVÊÖÒÕµÄÉú³¤£¬ÎÒÃÇ¿ÉÒÔÆÚ´ý¿´µ½Ô½·¢ÏȽøºÍǿʢµÄоƬ²úÆ·Ó¦Óõ½¸÷¸öÁìÓòÖУ¬Íƶ¯¿Æ¼¼µÄһֱǰ½ø¡£